AP-1000 Plasma System0 pages

AP-1000 Plasma System
Features and Benefits

PLC controller with touch screen provides
an intuitive graphical interface and real
time process representation
Flexible shelf architecture allows
processing of a wide variety of part
carriers in either direct or downstream
plasma mode
13.56 MHz RF generator has automatic
impedance matching for unparalleled
process reproducibility
Proprietary software control system
generates process and production data for
statistical process control

Uniform plasma treatment for the most
demanding production environments

Enhanced productivity for high-volume capacity
requirements

The Nordson MARCH AP-1000 system is designed to
meet the rigorous demands of 24-hour operation in high
performance manufacturing environments. The system
delivers uniform plasma treatment with unmatched
reliability, safety and ease of operation.

The AP-1000 system with optional HTP (high throughput)
shelves combines the reliability and process quality of the
AP-1000 system with the proven benefits of Nordson
MARCH’s unique shelf design. The AP-1000 HTP system
optimizes use of the reactive ions found in RF plasma,
increasing treatment uniformity while decreasing process
time.

The AP-1000 system is completely self-contained,
requiring minimal floor space. The pump, chamber,
control electronics, and 13.56 MHz RF generator are
housed in a single enclosure. Full front access allows for
convenient access to all interior components. The pump is
positioned on rollers for easy removal.
The plasma chamber is constructed of 11-gauge stainless
steel with aluminum fixtures for superior durability. The
chamber has multiple removable and adjustable shelves to
accommodate a range of part carriers, including magazines,
trays, wafer and Auer® boats.

The AP-1000 HTP system allows selection from a range of
process gases such as Argon, Hydrogen and Helium. It
comes standard equipped with four mass flow controllers
for optimal gas control. Slotted magazines are placed
vertically inside the chamber.
Additionally, slotted magazines can be placed vertically
inside the chamber. Typically, each magazine holds a
minimum of 20 lead frames. The AP-1000 plasma
chamber can hold up to 12 magazines, depending on
magazine size.