AP-600 Plasma Treatment System0 pages

AP-600 Plasma System
Features and Benefits

Touch screen control and graphical user
interface give real-time process
information
Flexible shelf architecture allows
processing of a wide variety of piece
parts, components or carriers
13.56 MHz RF generator with automatic
matching network delivers excellent
process repeatability
Convenient facility hook-ups for periodic
calibration requirements used in
validation processes

State-of-the-art plasma treatment in a
compact, bench-top configuration

Plasma cleaning, surface activation and
adhesion improvement

The AP-600 system from Nordson MARCH is designed
to deliver exceptionally uniform plasma cleaning and
treatment with unmatched ease of operation, reliability
and low cost.

The AP-600 system is suitable for a wide variety of
plasma cleaning, surface activation and adhesion
improvement applications. These capabilities are used
for semiconductor manufacturing, microelectronic
packaging and assembly, and by manufacturers of
medical and life science devices.

The AP-600 system is completely self-contained,
requiring minimal bench space. The system chassis
houses the plasma chamber, control electronics, 13.56
MHz RF generator, and the automatic matching network
(only the vacuum pump is external to the system).
Maintenance access is provided through an interlocked
door or removable panels.
The plasma chamber is constructed of high-quality
aluminum with aluminum fixtures for superior durability.
The plasma chamber supports up to 7 removable and
adjustable powered or grounded shelves to
accommodate a wide range of piece-parts, components,
and part carriers including magazines, trays, and boats.

The AP-600 system can accommodate a wide range of
process gases including argon, oxygen, hydrogen, helium,
and fluorinated gases. The system comes standard with
two electronic mass flow controllers for optimal gas
control, with another two available optionally (four total
max.).