NEMA 4X and IP66 Mass Flow Controllers and Meters0 pages

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Brooks® Mf Series
Data Sheet
DS-TMF-Mfi-Mfx-MFC-eng
August, 2009
SPECIFICATIONS
Performance Characteristics:
Table 1 Flow Ranges
* Standard temperature and pressure equals 0°C and 101kPa (760
Torr). These mass flow controllers and meters can be calibrated to
other conditions. Specify at time of ordering.
** Refer to Table 2 for standard flow ranges which are based
on the meter/pipe size from 1-1/2 inches through 8 inches.
Control/Usable Range
50 to 1
Accuracy
±1% full scale including linearity at calibrated conditions
±1.5% full scale including linearity for Mf50 and Mf60 for
flow ranges greater than 20 slpm
Repeatability
0.25% of rate
Sensitivity to Mounting Attitude
±0.5% full scale maximum deviation from specified
accuracy after re-zeroing under 200 psig. Specify
mounting attitude at time of order to insure optimum
performance.
Mfi Series
Controllers: Mf50i, Mf51i and Mf53i
Meters: Mf60i, Mf61i and Mf63i
Mfx Series
Controllers: Mf50x, Mf51x and Mf53x
Meters: Mf60x, Mf61x and Mf63x
• NEMA 4X, IP66 watertight construction
• UL and cUL listed and recognized for
Class I Division 2 hazardous locations (Mfx)
• Wide FS flow range for measurement and control
of gases from 3 sccm to 1000 slpm N2 (control)
and 1000 slpm N2 (measurement)
• Flow control to 1000 slpm N2
• Flow metering to 1000 slpm N2
• Sensor: Removable (Mfi) / Welded (Mfx)
• Insensitive to mounting attitude
• Selectable response time
• Electrically activated valve override
• Low command flow cutoff
• Corrosion resistant valve
DESCRIPTION
The Brooks® Mf Series mass flow controllers and
flowmeters are specifically designed to be used in an
industrial environment. These controllers and meters offer
high accuracy, control and measurement of industrial
gases with the added integrity of NEMA 4X, IP66 industrial
packaging. Additionally, the Mfx Series offers Class I
Division 2 hazardous location approval. The heart of the
controller and meter is the removable flow sensor which
produces an electrical output signal linear with mass flow
rate. This output can be used for indicating, recording
and/or control purposes. The Brooks Mf Series Mass Flow
Controller has an integral valve and accepts a remote
setpoint which makes it a simple and easy to install flow
control system. Many options are offered to provide a
versatile system of mass flow control and measurement.
The control circuitry compares the command setpoint to
the flow signal and positions the precision solenoid control
valve. When the command signal is below 1% of full scale,
the control valve is positioned to fully closed. The control
valve can be latched fully open or closed by activating
the valve override circuit.
NEMA 4X and IP66 Mass Flow Controllers and Meters
Mf61
Mass Flowmeter
Mf50
Mass Flow Controller
Mass Flow Mass Flow Flow Ranges PED
Controller Meter Nitrogen* Module H
Model Model Min. F. S. Max. F. S. Max. Press.
(slpm) psi (Bar)
Mf50 Mf60 0.003 30 1500 (100) SEP
N/A Mf60 0.003 30 4500 (300)
Mf51 Mf63 10 100 1000 (68)
Mf53 N/A 100 1000 1000 (68) 1 for all 150 lbs.Flanges