SLA6920: Digital, UHP, Metal Seal, PC0 pages

Data Sheet
DS-PR-SLA6900-PC-eng
March, 2008

Brooks® Delta Class UHP
Metal-Sealed Pressure Controllers
UHP Series Models SLA6910 & SLA6920
General Features:
• Digital software can store 10 selectable
calibration and pressure ranges. Spares
inventories are reduced by limiting the
number of individual PCs required, lowering
inventory holding costs.
• Accuracy: ±0.5% F.S., including linearity
and hysteresis for precision control.
• Available with VCRTM , CS or C-seal Downport
connections - simplifying integration into
existing and/or developing tools and systems
in the semiconductor industry.
• All wetted surfaces are electro-polished
to 5 Ra internal finish to maintain particle,
moisture and contamination free processes
conditions.
• All-Metal seals, High leak integrity
(less than 10-10 atm-cc/sec He)
• Eliminates droop, hysteresis, and boost
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced
System-Wiring
• Accessibility of sensor, valve, calibration,
tuning and diagnostic data
• MAC-ID and Baudrate rotary switches, and
two bi-color status LEDs
• Standard Device-Profile, ODVA
Semiconductor-SIG certified
• Capable of: Polled, Bit-Strobe, Cyclic, &
Change-of-State messaging
Analog I/O:
• 15-pin
• 0-5 Volt command-setpoint and pressure signals
• Single sided +15 Volt DC power supply
• Separate ‘valve-override’ signal
• Compatible with Brooks Models 0150 Series
secondary electronics

Models SLA6910A
and SLA6920A Analog I/O
Pressure Controller

Models SLA6910D and
SLA6920D Digital I/O DeviceNet
Pressure Controller

Analog I/O Pin Connections:
Signal:

15-pin D-conn

Setpoint/Command Common

1

Pressure Signal Out

2

+15Vdc power

5

-15V(unused)

6

Setpoint/Command Input

8

Power Supply Common

9
10

+5V reference

11

Valve Override

12

Calibration Select Pin
*

Output Signal Common

13

Based on data collected determining MTBF for

Chassis Ground

14

Model 5964 valve and body.

No Connections

3, 4, 7, 15