LF100 Series: Liquid Flow Controllers0 pages

Brooks® LF100 Series Liquid Flow Controllers
Ultra high purity

» Provides solution for problematic peristaltic pumps
» Optimizes chemical consumption, improving process
reproducibility

» Repeatable controlled dispense rates minimizes waste
» Reduces wafer defects attributed to current dispensing
methods

Advanced control systems
Brooks LF100 series liquid flow controllers meet the needs of
your most demanding CMP and wet chemical processes. Our
next generation liquid flow capabilities support point-of-use
recipe management and dynamic blending applications. Closedloop control provides fast recovery time for set point changes
and fluctuation in facility pressure. Non-intrusive ultrasonic
sensors and flow through design eliminate particulate
contribution from the component. Leveraging our expertise in
fluid delivery and blending cultivated through our Mega product
line, Brooks delivers an integrated solution for your critical
process applications.

Brooks LF100 Series liquid flow controllers
Brooks LF100 series liquid flow controllers utilize ultrasonic
sensors and proprietary algorithms to provide highly accurate
and repeatable flows. Non-intrusive ultrasonic sensors prevent
detrimental impact on delivered fluids (agglomeration of slurry
and breakdown of sensitive chemicals due to shear force).
Brooks’ unique software takes into account the dual phase
nature of slurry and manages anomalies, including bubbles.
Both needle and pinch valve options are available.