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VDM Series Vapor Delivery Modules0 pages
All-In-One Vapor Delivery Modules
> Mass Flow Meters/Controllers for Gases
and Liquids
Bronkhorst High-Tech B.V. has many years of experience supplying
mass flow control solutions for many different applications within
such markets as semiconductor, chemical and solar industries.
Our instruments are made to a customers’ specification, in whichever
style is suitable, for laboratory, industrial systems or OEM installations.
Bronkhorst® thermal mass flow meters/controllers are used for accurate, repeatable control of inert gases as well as handling reactive
gases, covering flow rates from 0,7 mln/min up to 10.000 m3n/h (Full
Scale values). Bronkhorst® offers liquid flow meters/controllers for
small flow ranges, from 75 mg/h up to 20 kg/h based on thermal
mass flow sensors and from 50 mg/h up to 600 kg/h using Coriolis
mass flow sensors.
> Controlled Evaporation and Mixing
As a modern alternative to conventional bubbler systems, Bronkhorst®
introduced their CEM-System (Controlled Evaporation and Mixing)
in the mid-nineties, an innovative vapor delivery solution, based on
a liquid flow controller, an MFC for carrier gas and a temperature
controlled mixing and evaporation device. This solution provides
high accuracy, excellent reproducibility, fast response and does
not require an optimum conditioning of process temperature and
pressure. CEM-technology has successfully been applied in e.g.
analytical applications, coating systems and for humidification of
reactors.
> All-in-one Vapor Delivery Module
With the introduction of the VDM-Series Bronkhorst offers an
all-in-one vapor delivery module, incorporating the components of
the CEM-System and more! Besides gas and liquid flow controllers
and the temperature controlled evaporator, the VDM-Series feature
integrated power supply with display (1,8” TFT) and control functions.
As an option, the unit offers local or remote trace heating temperature control. The compact, ‘plug and work’ module can generate
(saturated) vapor flows within the range of 50 mln/min up to 10 ln/min.
It can be applied for atmospheric or vacuum processes and is capable
of evaporating mixtures and even solids, dissolved in solvents.
> Features
ut Provides accurate and stable vapor (mass) flow
ut Fast response
ut High reproducibility
ut Handles water, solvents, liquid mixtures
ut Flexible selection of gas/liquid ratio
ut Lower working temperature than conventional systems
ut Field proven evaporation method
ut No need for engineering or manufacturing
ut Pre-tested, safe and ready to use
ut Local or remote control (RS232 / FLOW-BUS)
ut eadout/Control panel, incl. 1,8” TFT display, alarm/signaling
R
and counter functions
> Options
ut Dual carrier gas supply
ut Dilution gas supply
ut Trace heating temperature control, incl. status indication
