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IQ+FLOW® Chip-sensor based Mass Flow Meters/Controllers for gases0 pages
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IQ FLOW
®
Micro Fluidic Mass Flow and Pressure Meters/Controllers
with high intrinsic quality
>tIntroduction
Bronkhorst High-Tech B.V, the European market leader in thermal
Mass Flow Meters/Controllers and Electronic Pressure Controllers,
has over 30 years of experience in designing and manufacturing
precise and reliable measurement and control devices. With a
wide range of instruments, Bronkhorst High-Tech offers innovative
solutions for many different applications in many different markets.
The instruments are made to customers’ specification, in arious
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styles, suitable for use in laboratory, industrial environment,
h
azardous areas, semiconductor or analytical installations.
>t Micro fluidic concept
The use of micro fluidic devices for research and analytical urposes
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has some important advantages. Firstly, because the internal volumes
within the instruments are very small, the analysis will be faster and
the amount of reagents and analytes used can be reduced.
The atter is especially significant for expensive reagents.
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Furthermore, the physical dimensions are much smaller than those of
conventional devices. This enables Life Sciences system ntegrators
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to downscale the size, inherently reducing the costs of ownership
of their quipment. Also, the availability of compact and lightweight
e
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nstruments could lead to the development of portable systems.
Actual size
>t World’s smallest Mass Flow /
t Pressure Controllers
Previously, conventional mass flow and pressure meters and
c
ontrollers have needed a footprint of 1.5”, as for instance pecified
s
in the NeSSITM system. Now, and in close co-operation with the
Netherlands organisation for applied scientific research TNO,
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Bronkhorst High-Tech has developed the IQ+FLOW mass flow ensor.
Due to the use of micro system technology (MST), Bronkhorst has
been able to halve the footprint dimension to 0.75”, thereby realising
ultra compact flow controllers for flow rates from 0.2 to 5000 sccm
(mln/min) and pressure controllers for 0.3 to 150 psi.
>t High intrinsic quality, featuring…
ut Compact assembly ensures space efficiency
ut Economical solution, low cost of ownership
ut Analog or digital communication
ut Top-mount modules; easily accessible
ut re-tested “Plug and Play” manifold assemblies,
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reducing custom testing requirements
3-channel Mass Flow Controller
