Calcium Fluoride0 pages

Nikon NICF Series Calcium Fluoride
NICF Series ADVANTAGES
High laser durability
Nikon’s strict process control and use of ultra-high-purity raw materials during the calcium fluoride growing process results
in increased durability to long-term exposure to high-power excimer lasers.

High quality crystals
Nikon is a leading supplier of large-sized, high-quality single crystal calcium fluoride. With our continuous process improvement cycle and
optimized growing conditions, we can produce material with minimal lattice and structural defects, resulting in increased laser durability.

High refractive index homogeneity
Nikon’s proprietary annealing process yields unsurpassed refractive index homogeneity.

Optical grades
Grade

Internal transmittance [%]
Sample thickness 10 mm

Laser durability

NICF-V

99.5t 157 nm
a

A

NICF-A

99.8t 193 nm
a

B

NICF-U

99.8t 248 nm
a

Birefringence

Recommended wavelength
VUV region, ArF excimer laser

C

2 20 nm/cm

ArF excimer laser
193 nm

on request

KrF excimer laser
248 nm
UV region, Visible region, IR region

NICF-S

Crystal orientation to be specified by the customer, <111>, random and custom orientations are available upon request.
Values stated above are valid for material with a diameter of 30260 mm and a thickness of 550 mm. Material outside this range will be regarded as custom.
Laser durability is classified into three groups, A, B and C, with NICF-V represents the highest grade of material available.

NICF Transmittance range
F2

ArF
193 nm

157 nm

KrF
248 nm

i-line
365 nm

g-line
436 nm

NICF-V
NICF-A
NICF-U
NICF-S

Transmittance data

VUV-UV region

Internal transmittance%

100
80
60
40

NICF-V
NICF-A
NICF-U

20
0
100

150

200

Thickness:10 mm

250

300

Wavelengthnm

NICF Available range of homogeneity
< 0.5

NICF-V
NICF-A
NICF-U
NICF-S

<1

< 1.5

<2

<3

at 633 nm
ppm
<4

<5

< 10

< 40

Not specified