TRITOR 1000 pages

TRITOR 100
Compact 3-D translation stage
Concept:
With the TRITOR series, piezosystem jena was the first
company to offer 3D piezo-nanopositioning stages
3
worldwide. The dimensions of 40 x 40 x 34 mm and the
motion range of 100 µm per axis make the TRITOR 100 one
of the smallest 3D stages available on the market with
integrated feedback sensors for closed loop control. The
unique design of the flexure hinges allow for excellent
usability with zero friction. High stiffness, in combination with
excellent straightness of motion, make the TRITOR series
ideal for high precision in the nano meter range for optics,
laser-technique, and any other type of high resolution
positioning application.

image: TRITOR 100

Specials:
Piezo electrical actuators can act much faster, and with a
higher accuracy to a signal change, than any motorized drive
available. The resolutions of piezo electrical actuators are
only limited by the signal noise of the control system.
Therefore, these systems are an excellent choice for
positioning applications in fiber alignment, optics, wafer
handling, medical equipment, etc. Each axis can be
controlled separately in closed loop mode. An integrated
sensor system is an available option that guarantees
accuracy in the nano meter range. Dynamic scan
applications are a typical utilization of the elements of the
TRITOR series. The simultaneous motion, available in X, Y,
and Z directions, offers a large degree of freedom during
use. All stages of the TRITOR series can be made with
special materials for extraordinary applications such as
vacuum or cryogenic applications.

Product highlights:
3D nano positioning stage
compact design with integrated
feedback sensors option
flexure hinge design without
mechanical play
motion range up to 100 µm
ultra precise translation based on FEAoptimized parallelogram design
highest positioning resolution
Applications:

Interfaces:
All stages are constructed with a top and a bottom plate.
Through holes are used for fixing the stage which is
important for all dynamic applications. On the top plate there
are several pin holes and threaded holes available for the
mounting of external components. The 3D elements are built
with reliable piezo stack actuators, with a flexible insulation
that is well suited for a high dynamic burden.

Tel: +49 (3641) 66880 • Fax: +49 (3641) 668866
info@piezojena.com • http://www.piezosystem.com
TRITOR_100_ds_Rev03_2012_05_23_corrected.doc

AFM and SFM microscopy
fiber alignment
beam steering/ optical technology
semiconductor technology