Smart SE0 pages

Sp e c t ro s copi c E l l i ps o me t e r for Thin Film A na ly si s
The Smart SE is an innovative spectroscopic ellipsometer for easy,
fast and accurate characterization of single and multi layers thin films.
HH Fast and Accurate
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The CCD detector of the Smart SE
acquires accurate ellipsometric data from
450 nm to 1000 nm in less than 1 second

HH Flexible
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The optical head of the Smart SE are mounted
on a compact manual angle of incidence that
allows data acquisition from 45° to 90° by step of 5°

HH Versatile

Smart SE

The Smart SE can be upgraded with:
¬¬ 200 mm or 300 mm mapping stage for uniformity measurements
¬¬ Automated variable angle of incidence for complex analysis
¬¬ In-situ configuration for real-time process monitoring

Visualization of the spot on the sample
with the MyAutoView vision system

HH Unique Capabilities
¬¬ MyAutoView vision system for accurate positioning of the spot on any opaque or transparent substrates
¬¬ Seven automated micro spot size for measurements of patterned samples
¬¬ Full Mueller matrix measurement capability to study anisotropic and depolarizing samples

HH Thin Film Applications
¬¬ Film thickness from few Å to 15 µm
¬¬ Optical constants (n, k)
¬¬ Optical bang gap
¬¬ Gradient, anisotropy and depolarization

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