Piezo LEGS Linear Twin-C 450N0 pages

Piezo LEGS Linear Twin-C 450N
®

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Direct drive – backlash free
Nanometer resolution
No power draw in hold position
Quick response
Heavy loads

The LTC450 motor is intended for high force and precision
applications. This includes applications in vacuum for
the semiconductor industry. The advantage of using the
Piezo LEGS technology is the very precise positioning
resolution, as well as automatic locking giving true setand-forget performance. The technology is based on
direct drive without any backlash.
The Piezo LEGS technology is characterized by its
outstanding precision. Quick response time, as well as
long service life are other benefits. In combination with
the nanometer or even sub-nanometer resolution the
technology is quite unique.

Controlling the motor

PiezoMotor offers a range of drivers and controllers. The
more advanced alternatives are the microstep drivers/
controllers in the 100- and 200-series. These products
allow for closed loop control and precise positioning.
The microstepping feature divides the wfm-step
into thousands of small increments which results in
microsteps in the nanometer range. The PMD units are
straight forward to use, supports quadrature and serial
sensors, and have multiple I/O ports.

PMD101

PMD206

Design your own driver

Some customers prefer to design their own driver for
ease of integration. In this case PiezoMotor can provide
information to assist in the design.

Operating modes

The motor can move in full steps (waveform-steps), or
partial steps (microsteps) giving positioning resolution
in the nanometer range. Speed is adjustable from single
microsteps per second up to max specified.

Ordering information
Motor
LTC45011-020

Standard

Drivers and Controllers
PMD101

1-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Linear Encoders
See separerate data sheet