SLA6940: Digital, UTHP, Metal Seal, RT0 pages

Data Sheet
DS-PR-SLA6900-RT-eng
November, 2008

Model SLA6940 UHP Series

Delta Class Remote Transducer
Pressure Controller/Flowmeter
General Features:
• All wetted surfaces are electro-polished to
5 Ra to maintain particle,moisture and
contamination free process conditions.
• All-Metal seals, High leak integrity
(less than 1x10-10 atm-cc/sec He)
• Flow accuracy: ±1% of rate or (setpoint)
including linearity.
• Digital software can store10 selectable flow
applications inventories are reduced by limiting the
number of individual MFCs required, lowering
inventory holding costs.
• DeviceNet Protocol
Control Response:
• Settling Time of less than 800 ms for all step
changes. Valve response can also be ramped
to tailor MFCs performance to process
requirements.
• Proprietary Adaptive Valve Control algorithm assure
that unexpected variations in process conditions do not
cause flow to deviate from setpoint.
• Insensitive to mounting attitude

Model SLA6940A
Analog I/O

Model SLA6940D
Digital I/O DeviceNet

Analog I/O:
• 15-pin D-connector
• 0-5 Volt setpoint and flow signals
• Single sided +15 Volt DC power supply
• Separate ‘valve-override’ signal
• Compatible with Brooks Models 0150 series
secondary electronics
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced
System Wiring
• Accessibility of sensor, valve, calibration,
tuning, diagnostic, and other internal data,
to support fast commissioning and
streamlining of controller insitu preventive
maintenance.
• MAC-ID and Baudrate rotary switches, and
two bi-color status LEDs - to ease setup and
addressing as well as status confirmation.
• Standard Device-Profile, ODVA certified
Semiconductor-SIG certified
• Capable of: Polled, Cyclic, & Change-of-State
messaging.

Description
The Brooks® Model SLA6940 Pressure Controller/
Flowmeter controls pressure while also measuring
flow rate. The Model SLA6940 receives a remote
pressure transducer signal, and using adjustable
integral PID control electronics and control valve, will
maintain a desired set pressure. In addition to the
pressure control function, the Model SLA6940
provides a 0-5 V signal which is linear with mass flow
rate. The Model SLA6940 can also be configured as
a mass flow controller for calibration or test
purposes.

1