XacTorr CMX160 Series: High Temperature, Capacitance0 pages

Brooks® CMX160 Series
Digital Capacitance Manometers
High Temperature Process Vacuum Gauge

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Advanced Digital Architecture (Patent 6,910,381;
7,010,983; 7,490, 518)
Digital Calibration
Intelli-Touch Zeroing Feature
Digital Temperature Control (Patent 6,701,790 & 7,720,628)
Contamination Resistant Sensor
Improved Sensitivity to Temperature & Humidity
(Patent 6,734,659)

Product Description
TM

Brooks’ CMX160 (XacTorr ) is a compact heated vacuum gauge
providing accurate total pressure measurement independent of
gas composition. The CMX160 Series’ digital architecture delivers
improved performance, enables in-situ diagnostics and data
logging facilities while maintaining an industry standard analog
interface.
Designed for demanding thin-film processes such as LPCVD
Nitride and Metal-CVD, the CMX160 Series provides superior
reliability by combining Brooks’ patented shielded sensor
technonlogy and patent pending digital temperature control,
greatly reducing the buildup of process condensable products that
lead to process drift and premature failure of the gauge.
The CMX160 Series is offered in multiple ranges and supports
industry standard electrical interfaces, ensuring an upgrade path
from legacy analog capacitance manometers.

Features
Flexible digital signal processor based electronics
eliminates manual potentiometers and drift
associated with the aging of old-style analog
electronics.
Digital precision:
Multi-decade digital calibration provides superior
window of “known accuracy”.
Real-time compensation of ambient temperature
effect for improved measurement repeatability
lntelligent zero adjustment, local push-button and
remote zeroing for ease of maintenance and
improved long-term repeatability.
lntelli-Tough Zeroing ensures that the CMX160
Series cannot be zeroed if the pressure is too high or
if the gauge has not reached a stabilized operating
temperature - a common operator error with analog
capacitance manometers.
Highly effìcient dual-zone temperature control:
Real-time temperature control of the sensor for
improved measurement stability and repeatability.
Fast warm-up with intuitive temperature status LED.
Rapid response to changing system conditions
Unique corrosion resistant, shielded sensor design
offers superior protection against condensable process
byproducts, which can degrade accuracy and shorten
the life of the instrument.