HPM 2002 digital vacuum gauge0 pages

www.teledyne-hi.com
TELEDYNE HASTINGS INSTRUMENTS
Modell 2002®
FEATURES
• Combined Pirani and Piezoresistive Sensors in a
Single Tube
• Wide Dynamic Range: 1000 Torr to 1x10-4 Torr
• Automatic Crossover Calibration
• Attitude Insensitive – Can Be Mounted in Any
Orientation
• Fast Dynamic Response Time
• Compact Rugged Design
• Burst Pressure 150 PSIG
• Linear Per Decade Output Signal
• Custom Outputs Available
APPLIICATIIONS
• Wide Range Vacuum Applications
• Process Control and Test
• Ultra-Fast Response
• General Vacuum Control
• Vacuum Furnace Control
• Loadlock System
• Transformer “DeGAS” System
• Sputtering Chambers DUAL SENSOR VACUUM GAUGE
DESCRIIPTIION
The Model 2002, Dual Sensor Vacuum Gauge, is a wide
range vacuum instrument consisting of a digital microprocessor-
based display unit, two sensing elements (micro-
Pirani and piezoresistive bridge) in a single tube shell, and
an interconnecting cable. Together, these components provide
accurate vacuum measurement over 7 decades of
pressure from 1x10-4 Torr to 1000 Torr. This instrument is a
new design approach based on over 60 years of experience
by Teledyne Hastings Instruments (THI) with well-known
pressure measurement techniques. A single tube contains
both a THI patented thin film Pirani sensor and a piezoresistive
sensor in a small, rugged and inexpensive package.
The piezoresistive bridge is a direct force sensor which
gives very accurate readings at high pressures from atmosphere
down to less than 1 Torr without the concerns of gas
composition. The thin film Pirani measures pressures from a
few Torr down to 1x10-4 Torr. An algorithm residing in the
microprocessor ensures a seamless transition between
sensors. Additionally, the two sensor outputs are used in a
cross calibration mode to give even higher accuracy.
New Sensor Design
The Model 2002 sensors are mounted in a rugged corrosive
resistant 316 stainless steel tube. The small packaging
reduces the sensor’s internal volume, significantly improving
response time. The tube can be mounted in any orientation
with no effect on calibration and is far more rugged than
standard fragile convection driven Pirani tubes. The two
sensors reside on a single gold plated Kovar header.