IGE 3000, Digital ionization vacuum gauge0 pages

TELEDYNE HASTINGS
INSTRUMENTS
IONIZATION GAUGE ELECTRONICS
AND GAUGE TUBES
DESIGN FEATURES
The Teledyne Hastings Instruments
IGE-3000 line of Ionization Gauge Tubes and Electronics provides the user with accurate, repeatable pressure measurement starting in the medium vacuum range and continuing through into the ultrahigh vacuum range.
A complete measurement system consists of a dual-filament miniaturized Bayard-Alpert ionization gauge tube and electronics package.
The gauge tube includes several innovations
over conventional Bayard-Alpert tubes. For example, the filaments are precisely tensioned to give repeatable performance. In addition, all tube materials are selected and processed to yield consistent structural integrity.
The electronics package consists of four PC boards. The first board contains a precision electrometer which is capable of measuring
ion currents to 1 pA. This board also contains a highly stable anode supply and filament drive circuit.
The second board is a power supply board which contains power conversion circuits for the entire electronics package. Utilizing a separate board ensures that the precision electronics of the first board are isolated from power conversion noise.
A CPU board contains the instrument’s firmware. Calibration coefficients are stored on a memory chip; calibration services are available.
The top PC board contains a bright LED display and gauge status indicators. An intuitive user interface makes the gauge very easy to use.
IGE-3000
Model IGE-3000
FEATURES
• Range — 10-10 Torr to 10-2 Torr
• Miniature Bayard-Alpert Tube
• 24 VDC Input
(11.5 VDC – 30 VDC)
• Stable Accurate
Electrode Voltages
• Precision Electrometer
• RS232/485 Communication
• Two Independent TTL
Setpoints
• Automatic or Selectable
Emission Current
• Dual Filaments with Status Indicators
• Automatic High Pressure
Shutdown
• Capable of Remote Filament
Operation
• CE Compliant: EN61326
APPLICATIONS
• Thin Film Coating
• Plasma Processing
• Vacuum Furnace
• Sputtering
• Calibration Systems
• Accelerator
• Lighting Manufacturing
• CVD
IGE-3000s