CMP Profile® II Filter Capsules0 pages

"

CMP Filtration Capsules

nnnn

Data Sheet A33a

nnnn

PALL) Microelectronics

nnnn

CMP Profile® II Filter Capsules

nnnn

Description

nnnn

CMP Profile II Filter Capsules are

nnnn

designed for the filtration of both oxide

nnnn

and metal slurries at chemical mechani-

nnnn

cal polishing (CMP) tools.

nnnn

• Compact completely disposable

nnnn

capsule consists of an all polypro-

nnnn

pylene Profile II filter element in a

nnnn

heat-welded polypropylene shell.

nnnn

• Profile II filter elements are techno-

nnnn

logically advanced depth filters with

nnnn

absolute removal ratings. The unique

nnnn

construction with built-in preflltratlon

nnnn

assures long service life and

nnnn

consistent high level performance with

nnnn

neither breakthrough of contaminants

nnnn

nor shedding of filter medium.

nnnn

• The availability of absolute filter

nnnn

removal ratings, from 1 urn to 70 urn

nnnn

assures selection of the capsules to

nnnn

match the range of CMP slurries.

nnnn

• CMP capsules retain aggregated

nnnn

material and foreign matter and have

nnnn

not been shown to alter slurry

nnnn

polishing characteristics.

nnnn

Specifications

nnnn

Materials

nnnn

• Medium: Continuous polypropylene

nnnn

filament

nnnn

• Core: Polypropylene

nnnn

• Shell: Polypropylene

nnnn

Removal Ratings

nnnn

• 1 urn, 3 urn, 5 urn, 10 urn, 20 urn,

nnnn

40 urn, and 70 urn

nnnn

(Profile filter removal ratings can be

nnnn

5-10 times finer than traditional

nnnn

ratings for depth filters.)

nnnn

Operating Conditions1

nnnn

• Maximum Pressure:

nnnn

100 psid/7 bar @ 100°F / 40°C

nnnn

• Maximum Differential Pressure:

nnnn

60 psid/4 bar @ 77°F / 25°C

nnnn

30 psid/2bar@ 140°F/60°C

nnnn

• Maximum Temperature:

nnnn

140°F/60°C @ 60 psi/4bar

nnnn

Connections

nnnn

• Inlet/Outlet: %" NPT

nnnn

1 Recommendations are based on long term tests

nnnn

in water. Compatibility with other fluids must be

nnnn

checked before use.

"