Gaskleen® 1 1/8'' C-Seal Gas Purifier0 pages

"

Gas Filtration Purifiers

nnnn

Data Sheet A86h

nnnn

Gaskleen VÁ" C-Seal Gas Purifier

nnnn

Description

nnnn

A unique combination of Pall's leading

nnnn

edge AresKleen™ purification material,

nnnn

combined with Ultramet-L® stainless steel

nnnn

filter medium, creating the Industry's most

nnnn

advanced true point-of-use purifier.

nnnn

The Gaskleen top mount purifier assembly

nnnn

is designed to remove homogeneous con-

nnnn

tamination from process gases to sub ppb

nnnn

levels, while providing 3 nm filtration.

nnnn

• Controls and reduces Impurities such

nnnn

as O2, H2O, CO2, CO, NMHC, Ni(CO)4

nnnn

and Fe(CO)6

nnnn

• Assembly hardware is made of 316 L

nnnn

stainless steel

nnnn

• High efficiency diffusion barrier Insures

nnnn

Integrity of reactive material until in

nnnn

service and upon removal

nnnn

• Superior pressure drop characteristics

nnnn

• Wide variety of gasses purified

nnnn

• 100% helium leak and pressure tested

nnnn

• Will not release hydrocarbons

nnnn

• Not orientation sensitive

nnnn

• No detectable metal contribution

nnnn

above background in HCI gas with

nnnn

H CLP material

nnnn

• No detectable metal contribution

nnnn

above background in H Br gas with

nnnn

HBRP material

nnnn

Specifications

nnnn

Materials

nnnn

• Electropolished 316 L stainless steel

nnnn

process wetted Internal components

nnnn

• < 0.13 urn / 5 uin Ra internal surface

nnnn

finish

nnnn

Particle Removal Efficiency Rating

nnnn

• 1 X 109 retention of particles > 3 nm up

nnnn

to 15 slpm

nnnn

Connections

nnnn

• C-seal, 1%" Interface

nnnn

Operating Conditions

nnnn

• Maximum operating pressure:

nnnn

3.5 MPa @ 100°C/500 psig @ 212°F

nnnn

• Maximum operating temperature:

nnnn

100°C/212°F (INP, SIP, FCR SF6P),

nnnn

40°C / 104°F (NH3R GEH4R OXR CLXP,

nnnn

HCLR HBRR CDAP)

nnnn

• EU Pressure Equipment Directive:

nnnn

Assemblies have been evaluated and

nnnn

designed using SEP per the European

nnnn

Union's Pressure Equipment Directive

nnnn

97/23/EC and are not CE marked

nnnn

Design Flow Rate

nnnn

• 0-3 slpm @ 0.21 MPa / 30 psig

nnnn

• Intermittent flow rates up to

nnnn

15 slpm can be accommodated"

nnnn

Packaging

nnnn

• Double bagged

nnnn

Outer bag: alumlnized mylar2

nnnn

Inner bag: polyethylene

nnnn

• Product packaged in argon

nnnn

environment

nnnn

Nominal Dimensions

nnnn

• Height: 76.2 mm / 3.0 in

nnnn

• Base width: 28 mm/1.125 in

nnnn

• Shell diameter: 28 mm / 1.125 in

nnnn

1 Contact Pall Microelectronics for further

nnnn

information

nnnn

2 Mylar is a registered trademark of Dupont Teijin

nnnn

Films, US Limited

"