Ortus 11000 pages
Optic
ORTUS 1100
Efficient electron-beam equipment for optics
High performance solution for optical coatings
A modification of equipment for the
production of coatings with high uniformity on
the details with a large radius of curvature is
possible
Good performance of the equipment is
provided by high pumping and coating speed
Ion-beam assistance to obtain dense and
stable coatings
Вакуум, который создает
Main s pec ifi c ations
Chamber diameter
Substrate size
Pumping system
Ultimate pressure in clean dry chamber, Pa
Monitoring system
Substrate holder
Heating
Technological devices
Coating uniformity for the entire spherical
surface of the dome-shaped substrate holder
sector, not more than, %
Coating uniformity for the satellite of the
planetary substrate holder,not more than %
1100 мм
Up to 300 mm
Dry pump for low vacuum, turbo molecular or cryogenic pump for
high vacuum.
5 х10-5
Optical control and quartz control systems.
Optical control system samples and quartz crystal control plates are placed
into a control unit, which is designed to automatically change them.
Optical control wavelength range, nm:
one-beam control:
380-1100, 380-1700, 380-2600, 1200-5000,380-5000, 200-1100,
200-1700, 200-2600, 200-5000
spectral spectral:
380-740, 380-1100, 1000-1700, 200-1100, 380-1700
Dome or planetary type
IR lamps, Resistive heater
Electron beam evaporators (2 pcs.), Thermal evaporator, Ion beam
source (option), Magnetron (option)
+/- 2,5
+/- 1,5
U til ities
Water
CDA
Power
Gases
Installation area, mm
Weight, kg
Distilled
6…8 kg/cm2
380/220 V ±10%, 50 Hz
Ar 99,99%, 0.2 l/min
O2 99,7%, 0.2 l/min
3166х5508х2507
2500
Схема размещения
системы в рабочем зале
ООО «Изовак»
тел.: +375 17 2931842
факс. : +375 17 2931845
info@izovac.com
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