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IF-SensorR250 pages
IF-SensorR25
How to achieve stable 3D
measurement in production
General specifications
Measurement principle
non-contact, optical, three-dimensional, based on Focus-Variation
Positioning volume (Z)
25 mm (mot.)
Ring light illumination
white LED high-power ring light, 24 segments
The system
Positioning help
coaxial laser beam
Dimensions (W x D x H)
126 mm x 153 mm x 202 mm, ControlServerHP: 190 mm x 500 mm x 450 mm
Optical 3D measurement sensor
Mass
4 kg
IF-SensorR25 is a solid optical 3D measurement instrument for automated form and roughness measurement
in production. The sensor is integrated into a production
line and delivers high resolution, repeatable and traceable
results when measuring surface characteristics in the
µm or sub-µm range. This resolution can hardly be
achieved by conventional 2D solutions or tactile techniques.
ControlServerHP
12 Core, 32 GB, 24” HD LED Monitor
Measurement object
surface texture: surface topography Ra above 0.009 µm with λc 2 µm; depending on surface structure
Objective specific features
2xSX
5xSX
10xSX
20xSX
13
10.1
34
34
33.5
20
13
Lateral measurement range (X,Y)
(X x Y)
mm
mm2
2
4
1
1
0.4
0.16
10
100
4
16
2
4
1
1
0.4
0.16
Measurement point distance
µm
1
0.5
0.2
5
2
1
0.5
0.2
µm
2
1
0.64
10
4
2
1
0.64
nm
40
20
10
1240
180
45
25
15
Vertical resolution
The robust technology of Focus-Variation delivers high resolution results with high repeatability in research and
production. Therefore IF-SensorR25 is a platform that
enables the use of the same measurement process both
in-line and in the lab. Standardized interfaces (QDAS)
support an easy and quick integration into production
allowing comparable in-line and lab measurements.
50x
17.5
Measurement noise
A measurement procedure from
development to production
20x
mm
Finest lateral topographic resolution
The benefits
10x
Working distance
Objective magnification (*)
nm
100
50
20
3500
510
130
70
45
Vertical measurement range
mm
16
12
9
25
25
25
19
12
50xSX
Measurement speed
≤ 1.7 million measurement points/sec.
(*) Objectives with longer working distance available upon request
Resolution and application limits
10x
20x
50x
2xSX
5xSX
10xSX
20xSX
Min. measurable height
Objective magnification
nm
100
50
20
3500
510
130
70
45
Max. measurable height
mm
16
12
9
25
25
25
19
12
Height step accuracy (1mm)
%
0.5
Min. measurable roughness (Ra)
µm
0.3
0.15
0.08
n.a.
n.a.
0.45
0.25
0.15
Min. measurable roughness (Sa)
µm
0.15
0.075
0.05
n.a.
n.a.
0.25
0.1
0.08
Min. measurable radius
µm
5
3
2
20
10
5
3
2
Measurement of surface quality and
finest form tolerances
IF-SensorR25 is a measurement system for quality assurance in serial production. It is suitable for numerous
materials including composite materials. The modular
design allows arbitrary extensions of hard- and software
for new and/or complex measurement tasks. In the field
of EDM, the sensor can be implemented directly in a Makino
machining center to perform in-machine measurement.
This “closed loop manufacturing” production concept
enables 3D measurement of components directly in the
machine, enabling up to a fourfold increase in machining
accuracy.
Min. measurable wedge angle
º
20
Max. measurable slope angle
The application
50xSX
º
87
AccurACY
Flatness deviation
2 mm x 2 mm with 10x objective
U = 0.1 µm
Max. deviation of a
height step measurement
height step 1000 µm
height step 100 µm
height step 10 µm
height step 1 µm
EUni: St: ODS, MPE = 1 µm, σ = 0.1 µm
EUni: St: ODS, MPE = 0.4 µm, σ = 0.05 µm
EUni: St: ODS, MPE = 0.3 µm, σ = 0.025 µm
EUni: St: ODS, MPE = 0.15 µm, σ = 0.01 µm
Profile roughness
Ra = 0.5 µm
U = 0.04 µm, σ = 0.002 µm
Area roughness
Sa = 0.5 µm
U = 0.03 µm, σ = 0.002 µm
Distance measurement
XY up to 2 mm
EBi: Tr: ODS, MPE = 0.8 µm
Wedge angle
β = 70 º - 110 º
U = 0.15 0 , σ = 0.02 0
Edge radius
R = 5 µm - 20 µm
R > 20 µm
U = 1.5 µm, σ = 0.15 µm
U = 2 µm, σ = 0.3 µm
EUni: St: ODS, MPE & EBi: Tr: ODS, MPE conform to ISO 10360-8
Software
Automation
integrated scripting language; LabVIEW framework; .NET remoting interface;
Alicona Inspect Professional (enables GD&T measurement)
Specifications in blue
mark Alicona specific
values.
30
alicona I IF-SensorR25
IF-SensorR25 I alicona
31
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