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Exhaust Pressure Controller_EC-5000 series0 pages
Exhaust Pressure Controller
EC-5000 series
The EC-5000 series exhaust pressure controller maintains
pressure within a chamber at any desired level.
The high-resolution stepper motor and butterfly valve with
unique structure ensure high-speed response and
high-resolution control.
sHigh-vacuum resistance: Equipped with a
stainless steel body
sCorrosion resistance: Models with
PTFE (fluorine resin) body also available
sFor exhaust pressure control systems: A micro-differential
pressure sensor (EMTGC1B-A) and a controller (PCU-3000)
are also available
sComplies with RoHS regulations
RoHS compliant product
RoHS regulations:
RoHS stands for “Restriction of Hazardous Substances” and is a set of regulations enforced in the EU to limit the use of six hazardous substances:
lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs) and polybrominated diphenyls (PBDEs), in electric and electronic components.
sApplication example
Mass flow
controller
Excellent for vertical furnaces,
particularly phosphorus diffusion
and pyrogenic oxidation.
Models with PTFE
(fluorine resin) body are
resistant to high temperatures
and corrosive gases.
Corrosion-resistant pressure
sensors also available.
House exhaust
PCU-3000
MFC
Pressure
sensor
Spin coater/developer process
Maintaining exhaust pressure at an optimal level has the following effects.
100 V AC
SC-EEMT
thickness
•Even distribution of resist filmdeposition
•Prevention of secondary mist diffusion
•Prevention of dangerous vapor
Ball
valve
SC-EEC2
EC-5000 series
Diffusion and thermal
oxidation process
Diffusion furnace
Compared with control by flow rate sensors, the pressure controller
also reduces sensitivity changes over time caused by the accumulation
of resist and other contamination, eliminates the effects of turbulent
flow noise, and provides stable and responsive control.
Dry air
PCU-3000
Wafer
SC-EEC2
Trap
100 V AC
Pressure
sensor
EC-5000 series
Effects of changes in source pressure
Trap
0
10sec
Controlled press
Valve position
50
0
Pressure changed from 200 Pa to 50 Pa
20
Pressure, Pa(G)
House exhaust
100
The following graph shows a rapid response at all valve
positions up to it being fully open.
100
Valve position, %
Pressure, Pa(G)
200
Control response
100
House exhaust
Control
Open
Open
10
50
Controlled press
10sec
0
Valve position
0
Valve position, %
The following graph shows the pressure control observed when
the source pressure is changed. The graph reveals the outstanding
stability of the pressure control.
