CIS Closed Ion Source Gas Analyzers0 pages

Closed Ion Source Gas Analyzers
CIS100/200/300 — 100, 200 and 300 amu systems
CIS Series Closed Ion Source Gas Analyzers
· 100, 200 and 300 amu systems
· 1 ppm detection
· 10 mTorr max. operating pressure
· 1 × 10−12 Torr detection limit
· RGA Windows software
With better than 1 ppm detection limit, direct sampling at mTorr
pressure, and a user-friendly Windows software package, the
CIS systems will satisfy your most demanding applications.
On-line process monitoring and control, verification of process
gas purity at the point of use, high-vacuum residual gas
analysis, and process equipment leak checking are some of the
areas where these systems will prove indispensable.
Compact Design
· RGA and CIS mode
The probe consists of a quadrupole mass spectrometer with
a CIS ionizer mounted inside a 2.75" Conflat® Tee. The
control unit mounts directly on the probe’s feedthrough
flange and contains all the necessary electronics for operating
the instrument. The side port of the CIS nipple provides a
connection for the differential pumping system that keeps the
quadrupole, filament and detector at high vacuum. The system
can be connected directly to a process chamber through its
standard CIS mounting flange (2.75” CF). All parts in the unit
are self-aligning making servicing easy. You can clean and
reassemble the probe, and replace the filament and electron
multiplier in the field, without ever calling the factory.
· CIS100/1 ... $7250 (U.S. list)
Gold Plated Ionizer
· CIS200/1 ... $8250 (U.S. list)
The entire ionizer is made of gold-plated stainless steel. This
reduces outgassing and background signals in the ionization
region, improves long-term stability, and permits operation
· Field-replaceable electron multiplier
and filament
· CIS300/1 ... $9750 (U.S. list)
Stanford Research Systems t
phone: (408)744-9040
www.thinkSRS.com