Standard Incremental Reticles0 pages

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STANDARD INCREMENTAL RETICLES
SPECIFICATIONS:
Allowed defects within optical active area:
t One scratch with a width < 10 µm on both sides allowed,
t length not critical
t Pinholes or chromium spots:
t - up to 1 000 lines: max. 3, Ø ≤ 100 µm
t - over 1 000 lines: max. 3, Ø ≤ 50 µm
t Comment: it is not allowed that the sum of several minor defects are
t larger than the max. allowed single defect!

Material:
t Selected floatglass. scratched and fractured
t Planeness: 10 µm/100 × 100 mm
t Coefficient of expansion α ≈ 8.5 × 10-6/K
t Glass-thickness: 1.0 ±0.1 mm
t Chippings: ≤ 0.1 mm
Grating:
t Sputtered chromium on glass
t Reflexion (λ = 850 – 900 nm): > 60 %
t Grating pitches: t10 : 10 µm
tt
20 : 20 µm
t Line : width ratio = 1 : 1
t Line width:t ≤ 10 µm: ±10 %
t t
> 10 µm: ±1.5 µm
t Accuracy: ≤ ±1.5 µm

Allowed defects outside optical active area:
t Three scratches with a width < 25 µm on both sides allowed,
t length and distance not critical
t Pinholes or chromium spots: Ø ≤ 200 µm, 3
t distance not critical
t Comment: it is not allowed that the sum of several minor defects are
t larger than the max. allowed single defect!
On request:
t Other glass types
t Other glass-thicknesses
t Other coatings
t Sliding coat on mask
t Other grating pitches

DIMENSIONS:

Date10/2013, Art.Nr. 599637-02, Doc.Nr. D599637-00-A-01, Technical adjustments in reserve!

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