miniZ0 pages

ultra-compact
water vapor desorption system

rbd
instruments

mini Z

advancing
materials science

description

The mini Z water vapor desorption system comprises a high power UVC emitter that
fits inside a standard 1.5 I.D. vacuum chamber tube and a compact power supply
which mounts directly to the 2.75" CF flange.
The mini Z is ideal for solving water vapor problems in compact vacuum chambers,
mini ALD chambers, pressure cells and load locks.
185 nm UVC radiation provides the correct wavelength of energy to desorb water
vapor molecules from the chamber walls which results in faster chamber pump
down times and lower ultimate vacuum.
The mini Z power supply is simple to use – just turn it on when you start pumping!
A remote ON/OFF option is available if you want to operate the mini Z by a process
controller or set point.
Simple, effective and affordable – the mini Z is the perfect solution to water vapor
problems in compact vacuum chambers.

specifications

Power Output

350 µW/cm2 @ 6 cm from end of emitter (2.75" flange)

Emittter Lifetime

5000 hours

Flange Sizes

2.75" or 4.5" CF flange, 40, 63, or 100 ISO flange

Power Supply

12 v @ 2.5 A, 90-264 V in

Power Supply Dimensions

1.77" H x 4.27" W x 3.15" L
All specifications are subject to change without notice.

rbd
instruments

2437 NE Twin Knolls Drive • Bend, Oregon • 97701
Phone: 541.330.0723 • Fax: 541.330.0991
sales@rbdinstruments.com • www.rbdinstruments.com