AP11000 pages

SERIES AP 1100
ABSOLUTE REGULATOR

Low flow — sub-atmospheric pressure

Operating Parameters

• Single stage
• SS 316L VAR secondary
remelt or super alloy
construction

Source pressure
Delivery pressure AP 1101
Proof pressure
Burst pressure

vacuum to 300 psig (21 bar)
100 mm Hg absolute to 10 psig
500 psig (34 bar)
8,000 psig (552 bar)

• Surface finish

• Only one nonmetallic
seal (PCTFE) in the
process stream

• Cleaned, assembled and

packaged for high purity
semiconductor applications

• Flow rate to 500 sccm

Other Parameters
Inlet/outlet connectors
Bonnet port
Flow coefficient (Cv)
Internal volume
Operating temperature
Surface finish

• Vacuum to 300 psig
(21 bar) inlet,
100 torr to 10 psig
(.7 bar) outlet

• Installation and operating

Inboard leakage
Outboard leakage
Leakage across seat
Installation

1/4 or 3/8 inch face seal or tube weld
1/8 inch NPT
0.05
0.49 in3 (8 cm3)
-40° to +160°F (-40° to +71°C)
15 µin Ra max / 10 µin. Ra avg.
(0.4/0.25 µm) standard; 10 µin (0.25 µm);
7 µin (0.18 µm); and 5 µin (0.13 µm) Ra max optional

2 x 10-10 sccs
2 x 10-9 sccs He at 300 psig inlet pressure
4 x 10-8 sccs He at 300 psig inlet pressure
surface or panel (optional)

instructions available at
www.aptech-online.com
in the Tech Briefs section

Materials
Type of Service
Wetted Parts
Body
Poppet, nozzle, diaphragm
Finish
Seat

Series AP 1100 S
Noncorrosive

Series AP 1100 SH
Corrosive (SHP* opt)

Series AP 1100 H
Corrosive

SS 316L secondary remelt
SS 316L
electropolished and passivated
PCTFE

SS 316L secondary remelt
Ni-Cr-Mo alloy / UNS N06022
electropolished and passivated
PCTFE

ENGINEERING DATA — SERIES AP 1100 ABSOLUTE REGULATOR

15 Ra max /10 Ra avg

(10, 7 & 5 Ra max options)

Ni-Cr-Mo alloy / UNS N06022
Ni-Cr-Mo alloy / UNS N06022
electropolished
PCTFE

All specifications subject to change without notice.

687 TECHNOLOGY WAY NAPA, CA 94558 • (707) 259-0102 • FAX (707) 259-0117

*SHP option Ni-Cr-Mo alloy poppet and diaphragm only.

www.aptech-online.com