"Active Isolation System AIS
AISٙ has two primary functions: nn

ComPASS PRO Waferinspection machine Active electro-pneumatic vibration isolation providing control in six degrees of freedom.Optimal vibration isolation performance without any amplification at resonance.Excellent level accuracy in both the vertical and horizontal plane.Minimal deflection and settling time after an acceleration or deceleration of a movingmass within the machine, shorter settling times equals greater machine throughput.Very efficient realtime control.PLC, CAN-Bus, one Controller and one High Speed electro-pneumatic servovalve for eachdegree of freedom.Each Controller consists of a microprocessor and integrated, high resolution sensors forposition, air-pressure and acceleration.Easy-to-use, intelligent WinSNI-Software for setting up and optimizing the AIS and forproviding system diagnostics.Two different modes of operation can be selected simply using a digital I/O. For example,scanning mode (during sensitive machine operations) to loading mode (during moving
mass within the machine).Feedforward-signal is not required from the machine controller.No disturbing heat generation, magnetic variations or high electrical power consumptionas by electromagnetic actuators / linear motors. >

nnRange of application

Optimal vibration isolation performance for machines with high dynamic forces
that are performing sensitive measurements and inspections, lithography equipment,laser machines, high resolution electron microscopes and machinery for thesemiconductor industry.
The AISٙ is utilized when the efficiency of isolation and the settling time ofconventional air-springs with electro-pneumatic leveling systems is insufficient.One function is to protect the precision machine from floor vibration. The otherprimary function is to improve the performance of the machine by minimizing
structure borne vibration created by the high dynamic forces produced during anacceleration or deceleration of a moving mass within the machine. In addition,settling time is reduced which minimizes the delay time before the machine can
start performing its sensitive operation. >
Lab table with active isolation Flat Panel Machine

nnController SPC-LC

Microprocessor Acceleration sensor(resolution 8 g)RS232 Diagnosis andUpdatesSensor for position(resolution 0,2 >
BILZ-Testfields m)Air-pressure sensor(resolution 0,2 mbar)CAN Bus (1MBaud)Servovalve MPYE >

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