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HYBRIDS & SUBSTRATES HP - MT0 pages
Hybrid Circuit Substrates
Vishay Electro-Films
High Power Multi-Tired Conductor
Hybrid Circuit Substrate
FEATURES
• Copper power lines up to 5000 microinches thick
• Gold small signal lines ± 100 microinches width tolerance
• Temperatures to 350 °C
Product may not
be to scale
• Substrate material: Alumina, Beryllium Oxide or Aluminum
Nitride
• Excellent adhesion
• Metallized through holes
• Filled vias
• Resistors available
• Sizes up to 4 inches x 4 inches
Vishay Electro-Films (EFI) has developed a thin film process that has the unique capability of incorporating up to
5000 microinches thick plated copper conductors on the same substrate with standard 100 to 300 microinches thick conductors.
Some hybrid circuit applications require thick copper conductors for the power lines but standard thickness small signal lines to
maintain tight line width control of critical elements. For example, a microwave application may require high power bias current
to GaAs or other semiconductor devices while also requiring tight line width control to obtain good high frequency performance
for lange couplers, filters or other critical signal patterns.
For standard, high power, low frequency hybrid circuit substrates, thick copper plating alone is ideal. The 5000 microinches thick
plated copper has a resistivity of less than 0.15 mΩ/square.
In most cases, the dc or low frequency copper power lines are overplated with nickel and gold to prevent oxidation, permitting
high temperature processing and operation. The conductor material for the small signal lines is normally gold. Several substrate
materials and various adhesion metals are available.
Consult Applications Engineer to discuss your requirements in detail to jointly develop the optimum metalization structure for your
application.
TYPICAL CROSS SECTION
POWER LINES
PG
PG
PN
PN
SIGNAL
LINES
PC
PC
PG
SG
SA
SA
PG
SG
PG
SG
SA
SA
METALIZED
WAFERS
PG
SG
SUBSTRATE
SA
PG
Plated Gold
SG
Document Number: 61053
Revision: 08-Mar-07
Sputtered Adhesion Layer
Sputtered Gold
PC
Plated Copper
PN
Plated Nickel
DRAWING NOT TO SCALE
For technical questions, contact: efi@vishay.com
www.vishay.com
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