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Atmospheric door L-VAT0 pages
Atmospheric door L-VAT
Series 07
Series 075
Transfer door-valve for SEMI applications
For operation in atmospheric pressure,
e. g. load lock chambers
No vacuum seals on actuator
Virtually particle and vibration free
L-motion
Gate material
aluminum or stainless steel
Aluminum
double acting
pneumatic actuator
with position indicator
DN (D1 x D)
Ordering numbers
type U
type V
SEMIt E21-94
46 x 236
t 1.8t xt 9.3
07510-UA24
07510-VA24
SEMIt E21.1-1296
50 x 336
t 1.9t xt 13.2
07512-UA24
07512-VA24
mm
inch
with solenoid for impulse actuation: 075 . . - . A44 (specify control voltage)
Additional opening sizes: see «Options»
Stainless steel
double acting
pneumatic actuator
with position indicator
DN (D1 x D)
Ordering numbers
type U
type V
SEMIt E21-94
46 x 236
t 1.8t xt 9.3
07510-UE24
07510-VE24
SEMIt E21.1-1296
50 x 336
t 1.9t xt 13.2
07512-UE24
07512-VE24
mm
inch
with solenoid for impulse actuation: 075 . . - . E44 (specify control voltage)
Additional opening sizes: see «Options»
136
K12 VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 www.vatvalve.com
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