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STACIS® iX SEM-Base? Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes0 pages
U.S. Patent Nos. 5,660,255,
5,823,307, Other Patents
Pending
STACIS iX
®
SEM-Base
Technical Manufacturing Corporation
™
n Isolation Systems
®
™
Active Piezoelectric Vibration Cancellation Floor Platform
for Scanning Electron Microscopes
U.S. Patent Nos. 5,660,255,
STACIS iX
VIBRATION CONTROL
SEM-Base
™
5,823,307, Other Patents Pending
Active Piezoelectric Vibration Cancellation Floor Platform
iX
for Scanning Electron Microscopes
™
n
SEM-Base Isolation Systems
Precision Vibration
Features
Marked
Piezoelectric
• Incorporates patented STACIS technology
Active
™
• Active inertial vibration cancellation system
™
Vibration Cancellation Floor Platform below 1 Hz
• Vibration cancellation starts
for Scanning Electron Microscopes
• Extended stroke piezoelectric actuators,
®
U.S. Patent Nos. 5,660,255,
5,823,307, Other Patents
Pending
ble-Base
Air
Technical Manufacturing Corporation
cellation SystemSEM-Base™ active
STACIS® iX
up to 60 microns
6technology but has a much smaller
active degrees-of-freedom
Features
Consists of two isolation systems in with
®
vibration cancellation®floor platform
footprint and installs easily series
• ncorporates
I
for maximum vibration cancellation
Transmissibility * STACIS technology Features
system is designed for use with scanminimal tuning.
• ctive inertial vibration cancellation system
A
• Incorporates10
patented MaxDamp®
1000%
• Incorporates
ning electron microscopes (SEMs).
™ Air Isolators
•
35.5 in. x 44.5 in. x 6.5 in., fits most
With vibration cancellation starting
SEMs are among the most vibration
• Active inertia
• Simple, robust, and cost-effective
Vertical commercial SEMs
below 1 Hz, SEM-Base features
Horizontal
sensitive tools made, and these
• Installs easily, minimal tuning required
•
L
•
Active Piezoelectric Vibration Cancellation Floor Platform oad capacity: 900 - 2,500 lb.
extended
Transmissibility *stroke piezoelectric actuators Featurescancellation starts below 1 Hz 35.5 x 44.5 x
precision instruments typically incor Microscopes mounting equipment
commercial S
for Scanning Electron • Optional shelves for
• ibration
V
and damped,
1000%
10
under the table powder-coated steel plates • Incorporates patented STACIS® technology
porate an internal vibration isolation
1
• active degrees-of-freedom
6
• Load capacity
that sandwich four isolators and
• Includes TMC’s DC-2000 Digital Controller
system. SEM-Base is compatible
TMC’s DC 2000 digital controller.
The system is only 6.5 in. tall, measures
35.5 in. x 44.5 in., weighs approximately
650 pounds, can support 900 to 2,500
0.1
pounds, and has no soft air
suspension.
(
Vertical
Horizontal
(
Transmissibility
1
SEM-Base is a compact, cost-effective
alternative to our 65 Series STACIS® 2100
Floor Platform. It incor orates STACIS
p
• Active inertial vibration cancellation system
• nstalls easily,
I
minimal or no tuning required
• 35.5 x 44.5 x 5.5 inches, fits most
commercial SEMs all internal tool
•
Compatible with
vibration isolation systems
• Load capacity: 900 - 2,500 90%
lb.
• o soft air suspension
N
• Vibration cancellation starts below 1 Hz
4.0
Vertical
10
Horizontal
Vertical
Frequency, Hz
Horizontal
TOP VIEW
* 2,1501lb. (980 kg) payload with
1
simulated floor vibration at VC-C
(500 micro-inches per second,
12.5 microns per second)
90%
0.1
((
chnoltuators
not
40
35.5 in.
(902 mm)
0.1
Amplification
1.0
• 6 active degr
• Simple, robus
isolation patented
• Incorporates systems STACIS® technology
• Optional cast
no lifting requ
• No inertial suspension
• Active soft airvibration cancellation system
• Ask about ou
• 35.5 in.
Optional casters allow easy portability,
(902 capacity: 900 - 2,500 lb.
• Load mm)
no lifting required
• Vibration cancellation starts below 1 Hz for installation
• Ask about our SEM-Lift™ System
• Extended stroke piezoelectric actuators,
up to 60 microns
44.5 in. (1130
• 6 active degrees-of-freedom mm)
90%
99%
0.01
• Extended stro
up to 60 micr
• Simple, x 5.5 inches, fits most
• 35.5 x 44.5 robust, and cost-effective
commercial SEMs
Isolation
by
ation
ating
s
10
1000%
simulated floor vibration at VC-C
(500 micro-inches per second,
1000%
12.5 microns per second)
99%
Amplification
Acceleration Transmitted
Transmissibility = Acceleration Transmitted
Transmissibility
Acceleration Input
Acceleration Input
.01
0.5
Transmissibility*
Isolation
))
10
• Vibration can
• Installs easily
• imple, robust, and cost-effective
S
• Extended stroke piezoelectric actuators,
• Optional casters allow easy portability, • Compatible w
up to 60 microns
isolation syst
no lifting required
• 6 active degrees-of-freedom ™
• No soft air su
cies and unprecedented levels of high 90%
frequency
The STACIS® iX LaserTable-Base combines
0.1
.01
99%
• sk about our SEM-Lift System
A
combined effect of two
these two technologies, air and STACIS®, into isolation due to the 0.5
1.0
4.0 • Installs easily, minimal tuning required
10
40
for installation
one integrated cancellation system. The result isolation systems in series.
Frequency, Hz
Transmissibility ** (continued on back side)
• Compatible
is vibration cancellation at very low frequenFeatures with all internal tool vibration
TOP VIEW
2,150 lb. (980 kg) payload with
Transmissibility
latest
elecs.
y level
y in
able
Isolation
with all internal SEM vibration
isolation systems.
Isolation
Acceleration Transmitted
Acceleration Input
)
Acceleration Transmitted
Acceleration Input
)
SEM-Base
Amplification
STACIS iX
Amplification
•
•
6.5 in. (140 mm)
nominal
• Installs easily, minimal tuning required
SIDE VIEW
Technical Manufacturing Corporation • 978-532-6330 • 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales
0.001
.5
.01
0.5
1
1.0
5
99.9%
10
Frequency, Hz
4.0
• Compatible with all internal tool vibration
isolation systems
50
44.5 in. (1130 mm)
10
40
6.5 in. (165 mm)
(140 mm)
nominal
nominal
• No soft air suspension
99%
• Simple, robust, and cost-effective
* 4,000 lb (1,800 kg) capacity LaserTable-Base™ with MaxDamp® Isolation System.
Frequency, Hz
Payload of Corporation • 978-532-6330 • 800-542-9725 (Toll
Technical Manufacturing2,000 lbs (907 kg), tested with simulated floor vibration at VC-C VIEW Free) • Fax: 978-531-8682 • sales@techmfg.com • www.techmfg.com
TOP
• Optional casters allow easy portability,
• 978-532-6330 •
* (500 micro-inches payload with
2,150 lb. (980 kg) per second, 12.5 microns per second).
simulated floor vibration at VC-C
(500 micro-inches per second,
12.5 microns per second)
800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales@techmfg.com
no lifting required
• www.techmfg.com
• Ask about our SEM-Lift™ System for installation
35.5 in.
(902 mm)
www.techmfg.com
•
978-532-6330
•
800-542-9725 (Toll Free)
•
Fax: 978-531-8682
•
sales@techmfg.com
SIDE VIEW
