Vent Gas Recovery Compressors in Solar Grade Polysilicon production plant using CVD technology0 pages

Vent Gas Recovery Compressors
in Solar Grade Polysilicon
production plant using CVD technology
• Reliable and safe. Our experience
is the basis for our compressors
for mixtures of Hydrogen,
Hydrochloric Acid, Di-/Tri
-Chlorosilanes and Silicon
Tetrachloride.
• Easy to maintain. The design
facilitates maintenance by the end
user
• Safe and clean. All compressor
components in contact with
the process gas are cleaned
and pickled for this specic
application. They are assembled
in special assembly rooms, free of
dust and other contaminants.
• Flexible solutions. Large single
compressors can be substituted by
a number of smaller compressors
running in parallel
• Adaptable to the various
requirements of small, medium
and large industries.
• Solar Grade Polysilicon
Technical Standard
Process data
Molecular
weight
Capacity
Nm3/h
Suction
pressure
min. - maxbar (a)
Delivery
pressure
bar (a)
Compressor
model
4-6
3 500
4-6
15 - 17
MS2/2267-A1
4-6
5 000
4-6
15 - 17
MS2/2267-A1
4-6
6 500
4-6
15 - 17
MS3/3267-A1
4-6
8 000
4-6
15 - 17
1 HPX 2
4-6
10 000
4-6
15 - 17
1 HD 2
4-6
15 000
4-6
15 - 17
1 HD 2
4-6
20 000
4-6
15 - 17
1 HD 4
Process data
Molecular
weight
Capacity
Nm3/h
Suction
pressure
min. - maxbar (a)
Delivery
pressure
bar (a)
Compressor
model
10 - 20
250
1-2
10 - 13
TS2/220-A2
10 - 20
500
1-2
10 - 13
WS2/400-A2
10 - 20
750
1-2
10 - 13
WS2/580-A2
10 - 20
1 000
1-2
10 - 13
MS2/1412-A2
10 - 20
1 250
1-2
10 - 13
MS2/1412-A2
10 - 20
1 800
1-2
10 - 13
MS3/2442-A2
10 - 20
2 500
1-2
10 - 13
MS3/2412-A2
10 - 20
3 600
1-2
10 - 13
2 HD 2
10 - 20
5 000
1-2
10 - 13
3 HD 4
The compressors listed are just our most requested models: other models are available
upon request.
www.siadmi.com
Industries
SIAD’s certied standard for the
polysilicon sector species:
• Double purging, at the distance
piece (Nitrogen) and main rod
seal packing (Hydrogen), to
ensure zero contamination of the
process by external agents.
• Compressor valve disks radiused
for optimised ow, to prevent
valve blocking by silanes, and
also providing the energy required
to drive the gas through the valve.
• Thermoplastic disks, rather than
metal plates, for the compressor
valves: thermoplastic disks, due
to their exibility, conform better
to the seat of the valve thus providing an excellent hermetic seal.
• Pressure measurement at the
face membrane rather than in the
tubing, to prevent tube blockage
by the silanes.