ellipsometer0 pages

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TECHNICAL NOTE

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Spectral Ellipsometer

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KEYWORDS

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f.jilllT.t?.'.!:.^.!?.?.?.?................... Spectroscopic ellipsometry is a powerful tool for thin film

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n/k Value metrology, omt implements this method in an easy-to-

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................................................... use system with an advanced modular optical and

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Sheet Resistance mechanical design.

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Industrial Monitoring

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For sophisticated measurements we provide different

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options like wavelength extension or motorized stages

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for spatially resolved measurements and auto-focus

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capabilities.

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STANDARD CONFIGURATION

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Light source halogen lamp

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Spot size 2x4 mm

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Angle of incidence fixed 70°

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Spectrometer

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Wavelength 380 -1000 nm

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Bandwidth 2 nm

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Detector CCD

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Stage

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Adjustable height (micrometer screw)

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Tolerance ±0.5°mminAOI

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± 1 mm in height

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Control / Analysis

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Repeatability

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Time for measurement

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Operating software

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Analysis software

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PC operating system

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< 2A (Si02 on Si)

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5-15 seconds

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VisuEl

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SCOUT

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Windows XP

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POTENTIAL APPLICATIONS

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Thickness of thin films

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Analysis of layers between 0 nm and 10 u.m

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- Multilayer

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- Single layer

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Material parameters

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- Conductivity / sheet resistance of TCO's

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(transparent, conducting oxides)

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- Band-gap of optical transitions

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- Chemical composition

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- Surface roughness

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Optical constants n/k

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Determination of refractive index and extinction

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coefficient

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Special applications

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- Ellipsometric measurement for biological

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applications

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- Measurements on rough surfaces

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- Surface layers on water or other liquids (Langmuir

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Blodgett)

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