P98-DS0 pages

W W W . M K S I N S T . C O M
W W W . M K S I N S T . C O M

Flow Measurement
& Control

MFC - P9B
PRESSURE INSENSITIVE, MULTI-GAS/MULTI-RANGE
MASS FLOW CONTROLLER FOR FAST AND ACCURATE
CONTROL OF CRITICAL PROCESS GASES
The MKS, model P9B MFC, is the next generation of MKS pressure insensitive, multigas/multi-range MFC for critical process gas flow control. The device uses the latest in
electronics and valve components enabling it to meet the most critical of process gas flow
control requirements.
The performance capabilities of the P9B are quickly apparent where short process steps
are required given the sub 750 millisecond control times and accuracy to within 1% of
setpoint. This performance extends over the range of process gases, whether “light” gases
such as helium or “heavy” gases like SF6. The P9B is a true multi-range/multi-gas MFC that
enables the user to have confidence in this device’s capability and minimize MFC inventory
requirements.
Utilization of the multi-gas/multi-range capability is made simple through the device’s
embedded software and standard Ethernet interface that requires no special software, only
a standard web browser and a PC. Already stored on the device are critical gas parameters
for most of the gases in use today by the semiconductor industry. It is a simple matter of
selecting the gas and specifying the range to configure the device. Through this interface the
user can also perform device monitoring diagnostics while the device is operating.

Features & Benefits
Superior Perf
ormance
•t Fast response to setpoint reduces flow t
t stabilization time for short process steps t
t and process control
•t Tightly controlled flow accuracy of t
t process gas enables improved chamber t
t process matching
• t Insensitive to upstream and downstream t
t pressure disturbances
t —t Accurate flow control without the need t
tt for additional dedicated pressure t
tt regulators
Reduces Overall Costs
•t Reduces MFC inventory through its t
t multi-gas/multi-range capability

•t
t
t
t

Accurate flow control over a wide
dynamic range, even when down ranged, t
reduces need for an additional low tt
range MFC

Easy to Integrate and Operate
•t Embedded configuration and diagnostics tt
t software that allows the user to check tt
t MFC functionality without device removal tt
t from the tool
•t Uses a standard web browser; no special t
t software required
•t Easy viewing of flow rate, gas type and t t
t full scale flow with its bright, self orienting t
t LED display