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Fluid Controle Equipment0 pages
SF-1U-2U
High-precision Flow Rate Meter for Precision Films
The SF-1 U»2U combines precision volumetric tubing with a soap film detector that allows it to measure
the flow of a variety of gases accurately. It measures the time required for a soap film to move through a
portion of the volumetric tubing (a standard volume), and determines the gas flow rate using the time
value along with measured values for temperature, and atmospheric pressure during the relevant time
period. There are four different types of volumetric tubing units (VP series), suitable for different ranges of
gas flow rates. The SF-2U features an internal atmospheric pressure sensor.
Volumetric tubing model | VP-1U | VP-2U | VP-3U | VP-4U | |
Flow rate measurement range | 0.2~10 mL/min | 2~100 mL/min | 20~1000 mL/min | 0.2~10 L/min | |
Flow rate measurement time | 120~2.4s | 60~1.2s | 60~1.2 s | 60~1.2 s | |
Precision | ±0.5% | 0.2~2 mtymin | 2~20 mlVmin | 20~200 mL/min | 0.2~1 L/min |
±1.096 | 2~10 mlVmin | 20~100ml7min | 200~1000 mlVmin | 1—10 L/min | |
Compatible gas | N2, Air, 02, H2, Ar, He, CH4, CaHs etc. 'Water soluble gases cannot be measured. | ||||
Display | LCD six-digit digital display (switches between measured flow rate, measured time, temperature, and atmospheric pressure setting) | ||||
Air pressure *1 | 930 to 1040 hPa, measurement precision: ±2.7 hPa (measured data can be used for corrections; if used for corrections, the total precision becomes 0.7 to 1.2%) | ||||
Automatic measurement functions | Average value calculated after between two and five automatic measurements, in auto-mode (previously recorded data can be recalled. Recorded data is deleted when unit power is turned off). | ||||
Power source | AC adapter (6V DC) "AC adapter sold separately; select Japanese or overseas specifications^ | ||||
Speed range | 5 to 40°C (accuracy guaranteed between 15 and 35°C) | ||||
External input/output *2 | Conforms to RS-232C | ||||
Mass | Main unit, as a set: 2.0 kg 2.7kg | ||||
"1: For the SF-2U. *2: A dedicated communication cable is used. (Not a standard RE-232C cross cable.) *3: There are differing safety standards among the countries to which these products are exported,
MFT-20
Using the MFT-20
Mass Flow Checker
This is an easy-to-use checker that checks the operation of a
mass flow controller (MFC). It monitors the communication of an
MFC by being connected itself to a connector between the MFC
and its control signal cable. This unit is equipped with a display
for flow rates and setup values, a potentiometer for setting flow
rates, and an output connector, which enable easy checking of
an MFC without removing it from the equipment piping.
Conversion adapter
Attachment cable: 2m
L^^jFi*
Conversion adaptor
Model no. | MFC connector |
CA-H | D-sub 9 pin (SEC-Z500W300/E40 Series etc.] |
CA-4 | Circle connector (SEC-4O0X/20O0 Series] |
■Conversion adapter Is optional.
/f\ Please read the operation manual before using this product to ensure safe and proper handling of the product.
• The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company.
• It is strictly forbidden to copy the content of this catalog in part or in full.
• All brand names, product names and service names, in this catalog are trademarks or registered trademarks of their respective companies.
HORIBASTEC
HORIBA STEC, Co., Ltd.
HEAD OFFICE
11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto, 601-8116 Japan
TEL: (81)75-693-2314 FAX: (81)75-693-2350
TAIWAN
HORIBA STEC Co., Ltd TAIWAN Branch
3F., No.18, Lane 676, Jhonghua Rd., Jhubei City,
Hslnchu County 302, Taiwan (R.O.C.)
PHONE: (886)3-656-1160 FAX: (886)3-656-8231
Tainan Office
1F., No.117, Chenggong Rd., Shanhua Township,
Tainan County 741, Taiwan (R.O.C.)
PHONE: (886)6-583-4592 FAX: (886)6-583-2409
CHINA
HORIBA TRADING (SHANGHAI) Co., Ltd.
Room 1701, United Plaza 1468 Nanjing Rd.
West Shanghai 200040 CHINA
PHONE: (86)21 -3222-1818 FAX: (86)21 -6289-5553
Beijing Office
Room 1801, Capital Tower Beijing, Tower 1 No.6 Jia,
Jianguomsnwai Ave. Chaoyang District Beijing 100022, China
PHONE: (86)10-8567-9966 FAX: (86)10-8567-9066
Shenzhen Office
701 Room, A6th Building, FuTong TianJun Garden,
Western HePing Road, LongHua Town, BaoAn District,
Shenzhen City, GuangDong Provience 518000, China
PHONE: (86)755-2967-1203 FAX: (86)755-2967-1192
Shanghai Service Center
P.m.303, No.84, Lane887, Zu-chong-zhi Rd.,
Zhangjiang Hi-tech Park, Shanghai 201203, CHINA
PHONE: (86)21 -5131 -7150 FAX: (86)21 -5131 -7660
ACC-AE33C
http://www.semi. horiba.com
KOREA
HORIBA STEC KOREA, Ltd.
110, Suntech-City, 513-15, Sangdaewon-Dong, Jungwon-Ku,
Sungnam-City, Kyungki-Do, 462-725 Korea
PHONE: (82)31 -777-2277 FAX: (82)31 -777-2288
SINGAPORE
HORIBA INSTRUMENTS (SINGAPORE) Pte. Ltd.
10 Ubi Crescent, Lobby B #05-11/12 Ubi techpark Singapore 408564
PHONE: (65)6-745-8300 FAX: (65)6-745-8155
U.S.A.
HORIBA/STEC Inc.
Santa Clara Head Office (Technology Center]
3265 Scott Boulevard Santa Clara, CA 95054
PHONE: (1 )408-730-4772 FAX: (1 )4O8-730-8975
Austin Office
9701 Dessau Rd., Suite 605, Austin, TX 78754
PHONE: (1 )512-836-9560 FAX: (1 )512-836-8054
Portland Office
10110 SW Nimbus Ave.Suite B11,Portland, OR 97223
PHONE: (1 )503-624-9767 FAX: (1 )512-539-4823
Reno Office (R&D Center]
805 Spice Island Drive, #5, Sparks, NV 89431
PHONE: (11775-358-2332 FAX: (1 (775-358-0434
Dallas Office
670 International Parkway, Ste. 170 Richardson, TX 75081
PHONE: (1 (972-470-9200 FAX: (11972-470-0645
New Hampshire Office
315 Deny Road, Suite 13 Hudson, NH 03051, U.SA
PHONE: (1 )603-886-4167 FAX: (1 )603-886-4267
U.K.
HORIBA INSTRUMENTS Ltd.
Kyoto Close, Summerhouse Rd., Moulton Park,
Northampton NN3 6FL England
PHONE: (44)1604-542-600 FAX: (44)1604-542-696
FRANCE
HORIBA INSTRUMENTS Ltd.
BURO club Gieres, 2 Avenue de Vlgnate 38610 Gieres, France
PHONE: (33)4-76-63-4915 FAX: (33)4-76-54-0399
NETHERLANDS
HORIBA INSTRUMENTS Ltd.
Bijsterhuizen 11 -58, 6546 AS Nijmegen, The Netherlands
PHONE: (31)24-366-0985 FAX: (31)24-366-0987
GERMANY
HORIBA EUROPE GmbH
Zur Wetterwarte 10 Haus 109 01109 Dresden Germany
PHONE: (49)351 -889-6807 FAX: (49)351 -889-6808
Printed in Japan
HORIBA
Semiconductor
Fluid Control Equipment Accessories
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HJUU
innnl
tuuu
Multifunct
PE-S7
Multifunction Control Unit
Control Unit
PE-D10/D20
Display Unit
DU Series
Dedicated Power Source
PE Series
Dedicated accessories
that maximize the performance
of fluid control products
Setting Unit
SU Series
55 Signal Cable
T: SC Series
1 Complying with all RoHS regulations
^ ^tif The Corporate Social Responsibility (CSR) of companies involves, among other
VflOnS J things, working to protect the environment. As a company within the HORIBA
ft —^^L Group, a leader in environmental analysis equipment, HORIBA STEC is always
striving to develop and manufacture environmentally sound products.
*RoHS regulations:
RoHS stands for "Restriction of Hazardous Substances" and is a set of regulations enforced In the EU to limit the
use of six hazardous substances (lead, mercury, cadmium, hexavalent chromium, polybromlnated biphenyls
(PBBs) and polybrominated diphenyls (PBDEs)), in electric and electronic components.
Conversion Adapter
C A Series
"
