QNP-L Series Single-Axis Linear Piezo Nanopositioning Stages0 pages

Single-Axis Linear Piezo Nanopositioning Stages
Travel ranges from 100 μm to 600 μm available

High-precision, frictionless flexure guidance
system
Superior positioning resolution and linearity to
0.007% with direct-metrology capacitive sensor
options
Mounting compatibility with other QNP-series
piezo nanopositioners
Open-loop and vacuum versions
Aerotech’s QNP-series of piezo nanopositioning stages offer
sub-nanometer-level performance in a compact, high-stiffness
package. A variety of travel (100 µm to 600 µm) and feedback
options make this the ideal solution for applications ranging
from microscopy to optics alignment.

High Quality in a Compact Package
The QNP piezo stages are guided by precision flexures that are
optimized using finite element analysis to ensure high-stiffness
and long device life. The resulting design offers outstanding
stiffness and resonant frequency enabling high process
throughput and fast closed-loop response. Furthermore, these
stages have been designed to provide excellent geometric
performance (straightness and angular errors) while at the same
time minimizing the overall stage package size.

Aerotech’s QNP-L series of
single-axis piezo nanopositioners
offer closed-loop travel options
of 100, 250 and 500 µm.

QNP-L Series

Long device lifetime

Linear Piezo Stages

QNP-L Series

High-resolution and Positioning Accuracy
All of the QNP piezo stages have the option of closed-loop
feedback using a unique capacitive sensor design that allows for
sub-nanometer resolution and high linearity. The capacitive
sensors measure the output of the positioning carriage directly
enabling superior accuracy and repeatability.

Ultra-Precision Control
When coupled with Aerotech’s Q-series of controllers and
drives, the QNP piezo nanopositioning stages demonstrate subnanometer positioning resolution and in-position stability
(jitter), and high-positioning bandwidth. Software options such
as Aerotech’s Dynamic Controls Toolbox and Motion Designer
packages provide a host of advanced yet easy-to-use tools such
as Learning Control, Harmonic Cancellation and Command
Shaping, providing improved tracking errors and faster stepand-settle times.
Automatic parameter and calibration identification is
accomplished using Aerotech’s FlashConfig feature. The stage
is automatically identified and all operational parameters
including axis calibration data are uploaded into the controller
ensuring safe, accurate and true “plug-and-play” operation.

Design Flexibility
Aerotech’s QNP piezo stages are available with capacitance
sensor feedback or without feedback (open-loop). Open-loop
provides a cost-effective option for applications where compact
size, high-dynamics and sub-nanometer positioning resolution
are required, but absolute positioning accuracy and repeatability
are not required. Open-loop designs can also be used where the
piezo position is controlled via an external feedback source
(interferometer, vision system, photodetector, etc.).

QNP-40-100L 0.5 nm bidirectional step plot measured with an external ultra-precision capacitance sensor. All sizes of the QNP-L
stage series offer exceptional sub-nm mechanical step capability.

www.aerotech.com

An optional mounting plate provides direct mounting to
English or metric breadboard optical tables. The QNP-series
also includes XY and Z stages in which common travels mount
together with adapter plates.
All QNP piezo stages are available in vacuum-prepared
versions upon request.

1