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Optical Sensor Systems from Carl Zeiss
Detector
MMS Family
MMS 1
MMS UV
Dimensions of pixels
25 x 2500 µm
25 x 2500 µm
25 x 2500 µm
Clock-Rate
2 MHz
2 MHz
2 MHz
Output
3V
3V
3V
Sensivity
40 µA/V
40 µA/V
40 µA/V
Rise time
35 V/ms
35 V/ms
35 V/ms
Frequency range
< 400 KHz
< 400 KHz
< 400 KHz
Power consumption
50 mW
50 mW
50 mW
Video-output
SMB-Socket
SMB-Socket
SMB-Socket
Diode array
Micromodul connection
MICS-D 10
Micromodul connection
MICS-D 10
Micromodul connection
MICS-D 10
Pin 1, 3, 5:
0 V – Digital ground
Pin 2: Start
Pin 4: Phi 2 – clock-rate
Pin 6: EOS – End of Scan
Pin 7, 9: Analogue ground
Pin 8: -5 V
Pin 10: +5 V
Pin 1, 3, 5:
0 V – Digital ground
Pin 2: Start
Pin 4: Phi 2 – clock-rate
Pin 6: EOS – End of Scan
Pin 7, 9: Analogue ground
Pin 8: -5 V
Pin 10: +5 V
Pin 1, 3, 5:
0 V – Digital ground
Pin 2: Start
Pin 4: Phi 2 – clock-rate
Pin 6: EOS – End of Scan
Pin 7, 9: Analogue ground
Pin 8: -5 V
Pin 10: +5 V
Realised with
15-Bit-AD-conversion,
integration time 10 ms,
Clock-Rate 200 KHz
15-Bit-AD-conversion,
integration time 10 ms,
Clock-Rate 200 KHz
15-Bit-AD-conversion,
integration time 10 ms,
Clock-Rate 200 KHz
Dynamic range
214
≈ 214
214
Noise
Monolitical compact
MMS UV-VIS I /
UV-VIS II
≤ 1,5 count standard
deviation of dark signal
≤ 1,5 count standard
deviation of dark signal
≤ 1,5 count standard
deviation of dark signal
Monolitical compact
Preamplifier
Optical components of the MMS family
■t
■t
■t
imaging grating
cross-section converter as optical input
diode array as opto-electronic output
are arranged around a central body and are attached to it.
Depending on the version, the central bodies may have
different designs. The two components important for the
interfaces – the cross-section converter and detector –
are common to all.
Central body
In the MMS 1, the central body contains a glass element
similar to a lens. The imaging grating has been directly
replicated on this glass element; the grating is thus permanently fixed and optimally protected against dust and
gases. The use of an optically denser medium and the
resultant larger aperture allows the use of small gratings.
This leads to fewer aberrations. For reasons of transmission, the solid glass element has been replaced in the UVsensitive modules by a hollow shell to which the grating
and the detector have been cemented. The overall stability
is not impaired by the tube design; the temperature-induced drift of the wavelength has even been reduced.
Gratings
The gratings for the MMS family itself consist of socalled holographic blazed, flat field gratings. The same
grating design is used for the VIS and the UV-VIS versions. The master grating has its efficiency maximum at
approx. 220 nm. Due to the higher optical density, the
efficiency curve of the VIS module is shifted by the factor
of the refractive index.
Cross-section converter
A fiber bundle, cross-section converter is used to further optimize the light sensitivity of the module. Single
fibers in a linear configuration form the entrance slit.
The diameter has been adapted to the pixel size of the
diode array used and the imaging and dispersive properties of the flat field grating. Thus, light intensities near
the theoretical limit are achieved. The cross-section
converter is an integral component of the spectrometer
design and is therefore not easy to modify. There is a
possibility, however, of modifying the length of the fibers and the design of the input. In addition, it must be
taken into account that quartz fibers which are used in
older MMS UV-(VIS-) modules form so-called solarization centers when they are exposed to deep UV light
below 220 nm. That means that the transmission of the
fibers is reduced when they are exposed to high-energy
light. The shorter the wavelength of the light (higher
photon energy) and the higher the intensity and the
longer the exposure time, the stronger and sooner this
effect occurs. This means that the transmission can
even be restricted in the range of more than 220 nm to
250 nm. This solarisation effect can only be partly cancelled by heating, but it is possible to correct it by
means of frequent reference measurements. For measurements below 225 nm, it is possible to equip the
MMS modules with solarization stabilized fibers. In the
standard modules, the use of a Schott WG225 filter
with a thickness of 3 mm is definitely recommended.
Interface
Connector assignment
System data
Detector
The silicon diode array S3904-256Q from Hamamatsu is
incorporated in the MMS family. The MMS 1 NIR
enhanced uses the Hamamatsu type S8381-256Q. This
array is packed in a shorter special housing which results
in a very small split-off angle, allowing an efficient grating design. When changing to a different detector, this
angle and the approximate spectrum length of 6 mm
must be taken into account. To suppress the second
order, the diode array has been directly coated with a
dielectric cut-off filter.
Carl Zeiss MicroImaging GmbH
07740 Jena, Germany
Industrial | Jena Location
Phonet:t + 49 3641 64 2838
Telefaxt:t + 49 3641 64 2485
E-Mailt:t info.spektralsensorik@zeiss.de
www.zeiss.de/spectral
Information subject to change.
Printed on environmentally friendly paper
bleached without chlorine.
72-1-0013/d – printed 03.11
The extremely compact design is a characteristic feature
of the spectrometers in the MMS family. Small designs
are possible because high repeatability, not high resolving power is required for many applications.
Monolithic Miniature Spectrometer
from Carl Zeiss
