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Diffractive Optical Elements for off-axis illumination0 pages
LASERS & MATERIAL PROCESSING I OPTICAL SYSTEMS I INDUSTRIAL METROLOGY I TRAFFIC SOLUTIONS I DEFENSE & CIVIL SYSTEMS
Diffractive Optical Elements tttttt
for off-axis Illumination
Multipole pupil illumination patterns
are required to achieve the highest resolution in mask projection
systems.
Diffractive Optical Elements (DOE)
by Jenoptik efficiently generate such
patterns with high precision and uniformity. The use of high-quality materials for the Jenoptik DOE results
in high lifetime even under intense
ultraviolet laser irradiation.
Features:
•t Precise, homogeneous tt
multipole illumination
•t Arbitrary illumination patterns
•t Highest efficiency by multilevel
diffractive structures
•t Cost-efficient binary DOE
•t High damage threshold and t
lifetime
•t Custom design with short t
delivery time.
Applications:
•t Semiconductor equipment
t- Lithography (OAI, SMO)
t - Inspection
•t Laser materials processing
•t Laser measuring systems
Microoptics
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